A continuacion elaboraremos el ejemplo 3.1 del libro de disenio de experimentos.
El Experimento de Grabado con Plasma
Un ingeniero electrico esta investigando un proceso de grabado con plasma usado en la fabricacion de un semiconductor. El esta estgudaindo los efectos de 3 factores: brecha de anodo-catodo (A), \(C_2F_6\) tasa de flujo de gas y poder aplicado al catodo (C), todo esto sobre la tasa de grabado. Cada factor esta corriendo a dos niveles. A continuacion mostramos los resultados de las replicas:
| -1 |
-1 |
-1 |
247 |
400 |
\((1)=647\) |
| 1 |
-1 |
-1 |
470 |
446 |
\(a=916\) |
| -1 |
1 |
-1 |
429 |
405 |
\(b=834\) |
| 1 |
1 |
-1 |
435 |
445 |
\(ab=880\) |
| -1 |
-1 |
1 |
837 |
850 |
\(c=1687\) |
| 1 |
-1 |
1 |
551 |
670 |
\(ac=1221\) |
| -1 |
1 |
1 |
775 |
865 |
\(bc=1640\) |
| 1 |
1 |
1 |
660 |
530 |
\(abc=1190\) |
Usando estos totales procedemos a calcular
\[\begin{aligned}
A &= \frac{1}{4n}[a - (1)+ab-b+ac-c+abc-bc] \\
A &= \frac{1}{8}[916-647+880-834+1221-1687+1190-1640] \\
A &= \frac{1}{8}[-601] \\
A &= -75.125 \\\\
B &= \frac{1}{4n}[b+ab+bc+abc-(1)-a-c-ac] \\
B &= \frac{1}{8}[834+880+1640+1190-647-916-1687-1221] \\
B &= \frac{1}{8}[73] \\
B &= 9.125 \\\\
C &= \frac{1}{4n}[c+ac+bc+abc-(1)-a-b-ab] \\
C &= \frac{1}{8}[1687+1221+1640+1190-647-916-834-886]\\
C &= \frac{1}{8}[2461] \\
C &= 307.625 \\\\
AB &= \frac{1}{4n}[ab - a -b +(1)+abc-bc-ac+c] \\
AB &= \frac{1}{8}[880-916-834+647+1190-1640-1221+1687] \\
AB &= \frac{1}{8}[-207] \\
AB &= -25.875 \\\\
AC &= \frac{1}{4n}[(1)-a+b-ab-c+ac-bc+abc] \\
AC &= \frac{1}{8}[647-916+834-880-1687+1221-1640+1190] \\
AC &= \frac{1}{8}[-1231] \\
AC &= -153.875 \\\\
BC &= \frac{1}{4n}[(1)+a-b-ab-c-ac+bc+abc] \\
BC &= \frac{1}{8}[647+916-834-880-1687-1221+1640+1190] \\
BC &= \frac{1}{8}[-229] \\
BC &= -28.625 \\\\
ABC &= \frac{1}{4n}[abc-bc-ac+c-ab+b+a-(1)] \\
ABC &= \frac{1}{8}[1190-1640-1221+1687-880+834+916-647] \\
ABC &= \frac{1}{8}[239] \\
ABC &= 29.875
\end{aligned}\]
El mayor diferencia en los efectos la vemos para \(A=-75.125\), la corriente \(C=307.625\) y la interaccion diferencia-corriente \(AC=-153.875\).
El analisis de varianza puede ser usado para confirmar la magnitud de estos efectos, para ellos calculamos la suma de cuadrados:
\[\begin{aligned}
SS_A &= \frac{(-601)^2}{16} \\
SS_A &= 22,575.1 \\\\
SS_B &= \frac{73^2}{16} \\
SS_B &= 333.1 \\\\
SS_C &= \frac{2461^2}{16} \\
SS_C &= 378,532.6 \\\\
SS_{AB} &= \frac{(-207)^2}{16} \\
SS_{AB} &= 2,678.1 \\\\
SS_{AC} &= \frac{(-1231)^2}{16} \\
SS_{AC} &= 94,710.1 \\\\
SS_{BC} &= \frac{(-229)^2}{16} \\
SS_{BC} &= 3,277.6 \\\\
SS_{ABC} &= \frac{239^2}{16} \\
SS_{ABC} &= 3,570.1
\end{aligned}\]
Finalmente para complementar vamos a proceder a crear una regresion lineal para determinar los coeficientes para A, C y AC. Para ello primero creamos nuestra tabla de datos:
A <- c(-1,1,-1,1,-1,1,-1,1,-1,1,-1,1,-1,1,-1,1)
B <- c(-1,-1,1,1,-1,-1,1,1,-1,-1,1,1,-1,-1,1,1)
C <- c(-1,-1,-1,-1,1,1,1,1,-1,-1,-1,-1,1,1,1,1)
observaciones <- c(247,470,429,435,837,551,775,660,400,446,405,445,850,670,865,530)
table <- tibble(A=A,
B=B,
C=C,
observaciones)
table$A <- as.factor(table$A)
table$B <- as.factor(table$B)
table$C <- as.factor(table$C)
table
Con esto ya podemos definir la regresion lineal:
fit<- lm(Y ~ A*B*C,data=experiment)
fit
Call:
lm(formula = Y ~ A * B * C, data = experiment)
Coefficients:
(Intercept) A1 B1 C1 A1:B1 A1:C1 B1:C1 A1:B1:C1
323.5 134.5 93.5 520.0 -111.5 -367.5 -117.0 119.5
Y con esto ya hemos definido la ecuacion de la siguiente forma:
\(Y=323.5 + 134.5A + 93.5B+520C -111.5AB-367.5AC-117BC+119.5ABC\)
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